Gold Sputter
|
SEM
|
Laser lithography-DWL2000
|
Substrate bonder
|
SUSS MA8/BA8
|
SUSS MA6/BA6
|
Multi Steps Spin Coater
|
2 Steps Spin Coater
|
LPCVD
|
PECVD
|
APCVD
|
Oxford ICPRIE
鄭仲辰
使用中
|
RIE Descum
|
O2 Descum
|
Samco ICP
|
RTA
|
Sputter
|
E-Beam Metal
|
E-Beam Oxide
|
EDS
|
Ellipsometer
|
Laser confocal microscope
|
|
|
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